625-00359-004-PA1 RING,TEMP TRANSFER,ESC， ALUMINA
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625-00184-023-P03 RING,UPPER GROUND,SiC 1.8MM
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625-00024-325-P02 FOCUS RING, SILICON,Ra3-4,THK 5
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625-00024-238-P01 COVER RING,63H 0 CVR N-U EAR,300ALUMI
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625-00024-234-R01 COVER RING,5.3 THK 0.5 CVR
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625-00024-031-PA1 RING,POIS,ICPALUINA 95%
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625-00010-010-P07 SHOWER HEAD,CVD SIC, DRIE
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625-00010-008-PA1 SHOWER HEAD,SI, ETCH
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615-01551-004-P01 GUIDERSCREEN SHIELDINGTSV300E SUS 304
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615-00763-534-P05 SHOWER HEAD, 15mm STEP
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615-00762-000-D04 BASE PLATE FOR SIC.OUTER ELECTRODE AL60
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615-00608-021-P02 SCREEN SHIELDING,STN2AL 6061-1
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